Clean Room – RIC2D

RIC2D Labs

RIC2D hosts its own clean room facility based at our Khalifa University Sas Al Nakhl campus. The ISO Class 6 certification cleanroom area is approximately 40m² and is dedicated to 2DM research and innovation. has been customized for RIC2Ds research needs, and curated with a careful selection of the latest equipment in 2D materials synthesis and growth, fitting of the immediate and strategic needs of the Center.

The clean-room has the full-range of (a) thin-film deposition and (b) etching capabilities. This enables ground-breaking research on electronics and sensors, in addition to supporting sophisticated multi-layer device fabrications, which are areas of highly interesting and strategic importance.

The equipment currently available, and under-delivery in the clean-room are
Thermal Evaporator – MiniLab60 – Moorfield	Versatile thermal evaporator with manual and automatic process modes, used for thin film depositions on different types of substrates of selected metals. Materials: Au, Ag, Cr, Al
Research Scale Atomic Layer Deposition (ALD) – Atomry – OKYAY Tech	Research scale ALD used for Plasma-Enhanced Atomic Layer Deposition of Al2O3, and TiO2
PVD – Sputter Deposition	Physical vapor deposition of multiple sources
Advanced Atomic Layer Deposition (ALD) – TFS 200 – Beneq	Used for Plasma-Enhanced Atomic Layer Deposition on both powder and wafer substrates of DiethylZinc (DEZ) for ZnO deposition (Thermal ALD), Bis(t-butylimido)bis(dimethylamino)molybdenum(VI) for MoO3 deposition (Plasma ALD), Bis(cyclopentadienyl)tungsten dihydride (WH2(Cp)2 ) for WO3 deposition (Plasma ALD), Tetrakis(dimethylamino)titanium (TDMAT) for TiO2 deposition (Plasma ALD).
Plasma Surface Treatment System – Diener Nano	This is a low-pressure plasma system used for cleaning of substrates and activating surfaces. Gases connected: O2, N2, Ar
Reactive Ion Etching (ICP-RIE)	Plasma assisted deep etching of multiple substrates including metal oxides, ceramics, and polymers, allowing for precise patterns with high-resolution.
Soft Etch	Soft-plasma etching of surfaces

Laboratory Bookings

To reserve time and access to our facilities and equipment please use our laboratory booking system here

For RIC2D research facilities inquiries, please contact the RIC2D Labs Team at

ric2d.labs@ku.ac.ae

Finally, the RIC2D labs also have a dedicated chemicals storage room, where all the chemical materials are stored in bulk, and dispatched to users in needed quantities.
Consumables rooms, where general inventory and essential items are kept in stock.
Office spaces, where the specialist lab staff reside.